관련링크
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single plane air bearing Stage
·Air bearing & Magnetic Preload Stage for Lithography
·Straightness of Scan : ±2㎛@1,800mm
·Yaw of Scan : <±0.65arcsec@1,800mm
·Resolution : 1.5mm (Controller : PowerPmac, Delta tau, USA)
Item | Spec. |
Guide | Air Bearing |
Repeatability | < ±0.4㎛ |
Straightness of Scan | < ±2㎛@1,800mm |
Straightness of Scan | < ±0.7㎛@850mm |
Yaw of Scan | <±0.65arcsec@1,800mm |
In-position Stability | < ±0.1㎛ |
Speed Ripple | < ±0.25%@35mm/s |
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