관련링크
본문
stack XY Stage
·Straightness of Scan : < ±1.5㎛@600mm (w/o Soft Compensation)
·Flatness of Table : < ±5㎛@300mm (X&Y)
·Yaw of Scan : < ±2arcsec@600mm
Item | Spec. |
Guide | LM Guide |
Max. Speed | 500mm/s |
Acceleration | 0.5G |
Accuracy | < ±1㎛ |
Repeatability | < ±0.5㎛ |
Horizontal Straightness | < ±1.5㎛@600mm |
Vertical Straightness | < ±3㎛@600mm |
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